ION BEAM TECHNIQUES
All general purpose codes for analysis of Ion Beam Analysis data have been originally developed to handle laterally homogeneous samples only, with only limited support for lateral inhomogeneity. We developed analytical simulations of samples that consist of a layer of parallel oriented nanowires on a substrate, and included it in the general purpose IBA code NDF. We applied the code to real samples, made of vertical ZnO nanowires on a sapphire substrate, measured with Rutherford backscattering. The model can be used to validate a given supposed nanowire structure, and also to eliminate alternative sample structures.